Stress-induced variations in the stiffness of micro- and nanocantilever beams.
Stress-induced variations in the stiffness of micro- and nanocantilever beams.
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DOI：
10.1103/physrevlett.108.236101
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发表时间：
2012-06-08
影响因子：
8.6
通讯作者：
Roukes ML
中科院分区：
文献类型：
--
作者：
Karabalin RB;Villanueva LG;Matheny MH;Sader JE;Roukes ML
表面应力对悬臂梁刚度的影响仍然是物理科学中的一个突出问题。尽管大量实验研究报告了表面应力导致的显着刚度变化，但理论预测无法严格且定量地协调这些观察结果。在这封信中，我们首次提出了应力引起的悬臂刚度变化的受控测量以及相应的理论量化。还在等效的夹紧梁上进行同步测量。所有实验结果均利用弹性理论进行定量且准确的预测。我们还提供了确凿的实验证据，证明长期存在的非物理轴向力模型的无效性，该模型已广泛应用于解释悬臂梁的测量结果。我们的研究结果对于微米级和纳米级谐振机械传感器的开发具有重要价值。
The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical predictions are unable to rigorously and quantitatively reconcile these observations. In this Letter, we present the first controlled measurements of stress-induced change in cantilever stiffness with commensurate theoretical quantification. Simultaneous measurements are also performed on equivalent clamped-clamped beams. All experimental results are quantitatively and accurately predicted using elasticity theory. We also present conclusive experimental evidence for invalidity of the longstanding and unphysical axial force model, which has been widely applied to interpret measurements using cantilever beams. Our findings will be of value in the development of micro- and nanoscale resonant mechanical sensors.