Theoretical investigation of two-dimensional sub-wavelength structures fabricated by multi-beam surface plasmon interference lithography
Theoretical investigation of two-dimensional sub-wavelength structures fabricated by multi-beam surface plasmon interference lithography
复制标题
多束表面等离子体干涉光刻二维亚波长结构的理论研究
DOI：
10.1209/0295-5075/ac2cf9
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发表时间：
2021-10
期刊：
影响因子：
--
通讯作者：
Xiaolei Wen
中科院分区：
文献类型：
--
作者：
Xiangxian Wang;Tianxu Jia;Yaqian Ren;Yingwen Su;Zhenyu Chen;Yunping Qi;Xiaolei Wen
Abstract. In this study, multi-beam surface plasmon (SP) interference lithography was theoretically proposed and demonstrated to fabricate periodic two-dimensional sub-wavelength structures. The lithography structures were based on an attenuated total reflection prism used to excite the SPs using a 442 nm laser. Circular lattices with periods of 166 and 288 nm were successfully obtained via three- and six-beam SP interference lithography, respectively; these lattices exhibited an identical feature size of 96 nm. Square dot arrays with a 177 nm period and 88.5 nm spot size were obtained by four-beam SP interference lithography. The proposed lithography technology has a simple structure and is economical; further, it may provide an effective method for the fabrication of two-dimensional sub-wavelength structures.
