Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation

Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation
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DOI：
10.1364/cleo_fs.2023.ftu3c.2
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发表时间：
2023-05
期刊：
2023 Conference on Lasers and Electro-Optics (CLEO)
影响因子：
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通讯作者：
Alexander Senichev;Zachariah O. Martin;Yongqiang Wang;H. Htoon;A. Lagutchev;A. Boltasseva;V. Shalaev
Alexander Senichev;Zachariah O. Martin;Yongqiang Wang;H. Htoon;A. Lagutchev;A. Boltasseva;V. Shalaev
中科院分区：
其他
文献类型：
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作者：
Alexander Senichev;Zachariah O. Martin;Yongqiang Wang;H. Htoon;A. Lagutchev;A. Boltasseva;V. Shalaev

文献摘要

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我们报告的单光子发射器的生成在氮化铝薄膜通过Zr离子注入，这是预测形成光学可寻址的自旋缺陷。我们研究了注入条件，后注入程序，和所得发射器的属性。
We report on the generation of single-photon emitters in aluminum nitride films through Zr-ion implantation, which was predicted to form optically addressable spin defects. We studied implantation conditions, post-implantation procedures, and properties of resulting emitters.