High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)
High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)
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DOI：
10.1021/acsanm.7b00342
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发表时间：
2018-03-01
影响因子：
5.9
通讯作者：
Plank, H.
中科院分区：
文献类型：
--
作者：
Fowlkes, Jason D.;Winkler, R.;Plank, H.
目前，很少有技术可以在纳米级上实现真正的3D打印。填补这一空白的最有希望的候选者是聚焦电子束诱导沉积（FEBID），这是一种无抗蚀剂、纳米纤维兼容的直写方法。介绍了实现3D-FEBID的计算机辅助设计（CAD）程序（3BID）的基本工作原理，并同时发布供下载。3BID功能大大扩展了目前有限的3D纳米打印工具箱，为光电，等离子体和纳米磁性应用提供了几何形状，这些应用以前由于缺乏合适的合成方法而无法实现。CAD方法取代了试验和错误，以实现真实的应用/设备原型所需的更精确/准确的FEBID。
Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a resist-free, nanofabrication compatible, direct-write method. The basic working principles of a computer-aided design (CAD) program (3BID) enabling 3D-FEBID is presented and simultaneously released for download. The 3BID capability significantly expands the currently limited toolbox for 3D-nanoprinting, providing access to geometries for optoelectronic, plasmonic, and nanomagnetic applications that were previously unattainable due to the lack of a suitable method for synthesis. The CAD approach supplants trial and error toward more precise/accurate FEBID required for real applications/device prototyping.