A silicon-based tactile sensor for finger-mounted applications
A silicon-based tactile sensor for finger-mounted applications
复制标题
适用于手指安装应用的硅基触觉传感器
DOI：
10.1109/10.661263
复制
发表时间：
1998
影响因子：
4.6
通讯作者：
John G. Webster
中科院分区：
文献类型：
--
作者：
David J. Beebe;Denice D. Denton;Robert G. Radwin;John G. Webster
提出了一种硅基力传感器封装在一个灵活的封装，并描述了传感器的性能对人体的主题。传感元件由一个圆形硅隔膜（200-/spl mu/m厚，半径2 mm）组成，位于一个10-/spl mu/m密封腔体上，该密封腔体具有一个固体Torlon圆顶，为隔膜提供力-压力转换。比较了两种圆顶高度（0.5和1.5 mm）。具有较高圆顶的传感器显示出更高的灵敏度。将传感器安装在5名人类受试者的优势拇指上进行动态校准和跟踪实验。力和加载方向均具有统计学意义（P<0.05）。受试者变异性占方差的8.7%，而加载方向占方差的1.9%。跟踪实验的平均误差范围为-2.8至1.0 N，并且取决于受试者。4名受试者中有3名显示负误差随负荷增加而增加。
Presents a silicon-based force sensor packaged in a flexible package and describes the sensors performance on human subjects. The sensing element consists of a circular silicon diaphragm (200-/spl mu/m thick with a 2-mm radius) over a 10-/spl mu/m sealed cavity with a solid Torlon dome providing force-to-pressure transduction to the diaphragm. Two dome heights (0.5 and 1.5 mm) were compared. The sensor with the taller dome showed improved sensitivity. Dynamic calibration and tracking experiments are performed with the sensor mounted on the dominant thumb of 5 human subjects. Both force and loading direction are statistically significant (P<0.05). Subject variability accounted for 8.7% of the variance, while loading direction accounted for 1.9% of the variance. Average errors for the tracking experiment range from -2.8 to 1.0 N and are subject dependent. Three out of 4 subjects showed increasing negative error with increasing load.
影响因子：
2.4
作者：
RADWIN, RG;OH, SY;WEBSTER, JG
通讯作者：
WEBSTER, JG