Net-shape ceramic manufacturing as an aid to realize ultrasonic transducers for high-resolution medical imaging

Net-shape ceramic manufacturing as an aid to realize ultrasonic transducers for high-resolution medical imaging
复制标题

净形陶瓷制造有助于实现高分辨率医学成像超声换能器

DOI：
--
复制
发表时间：
2005
期刊：
IEEE Ultrasonics Symposium, 2005.
影响因子：
--
通讯作者：
D. Zhang
D. Zhang
中科院分区：
--
文献类型：
--
作者：
T. Button;S. Cochran;K. Kirk;D. MacLennan;A. Macneil;K. McDonald;C. Meggs;D. Rodriquez;R. Webster;D. Zhang

文献摘要

被引文献

相似文献

高频超声波传感器在 对于需要高质量的医疗成像过程的需求 空间分辨率然而，成本效益的制造， 超过20MHz的频率是具有挑战性的。 其中一个问题是需要一层薄薄的 压电材料这很困难，因为典型的 厚膜和薄膜工艺产生的材料 太薄和研磨的散装材料是昂贵的， 效率低下。本文介绍了陶瓷净成形工艺， 作为替代品。这可以通过以下方法实现： 粘性聚合物加工，然后压延 所述绿色状态材料用于生产薄片，所述薄片可以 干燥、烧结，然后切割成型。虽然这样 薄的标本是脆弱的，除了一个支持 声学背衬材料允许直接 加工成最终的超声换能器。在这里， 报道了用TRS600FG材料制作的压电陶瓷， 厚度为50 µm和110 µm。的 已经发现这些样品的行为是相似的 例如以厚度模式 耦合系数kT为0.52，相对介电常数， 儿 S 1540的。原型超声波换能器， 已经制造了几毫米的元件直径， 并在接近50 MHz的频率下工作。 测试是在水下进行的， 成功结果表明，净成形陶瓷 制造与制造高质量的 频率超声波换能器
High frequency ultrasonic transducers are in demand for medical imaging procedures requiring high spatial resolution. However, cost-effective fabrication for frequencies above approximately 20 MHz is challenging. One of the problems is the need for a thin layer of piezoelectric material. This is difficult because typical thick and thin film processes produce material which is too thin and lapping bulk materials is expensive and inefficient. In this paper, net shape ceramic processing is reported as an alternative. This can be achieved with viscous polymer processing followed by calendering of the green state material to produce thin sheets which can be dried, sintered and then cut to shape. Although such thin specimens are fragile, the addition of a supportive acoustic backing material allows straightforward processing into the final ultrasonic transducer. Here, piezoceramic made with TRS600FG material is reported, finished to thicknesses of 50 µm and 110 µm. The behaviour of these samples has been found to be similar to bulk material, for example with a thickness mode coupling coefficient, kT, of 0.52 and relative permittivity, eR S , of 1540. Prototype ultrasonic transducers with element diameters of a few millimetres have been made and operated at frequencies approaching 50 MHz. Testing has been performed underwater and the successful results suggest that net shape ceramic manufacturing is compatible with the fabrication of high frequency ultrasonic transducers.