Tribological properties of diamond-like carbon film deposited on the inner surface of metal tube by using microwave-excited high-density plasma

Tribological properties of diamond-like carbon film deposited on the inner surface of metal tube by using microwave-excited high-density plasma
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微波激发高密度等离子体在金属管内表面沉积类金刚石碳膜的摩擦学性能

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发表时间:
2009
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作者:
Hiroyuki Kousaka;Mori Kazunori;Tamura Noboru;etc.

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