Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser
Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser
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DOI：
10.1007/s003390100943
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发表时间：
2002-06
期刊：
影响因子：
--
通讯作者：
S. Qin;W. Li
中科院分区：
文献类型：
--
作者：
S. Qin;W. Li
提出了一种利用调Q激光制作石英微通道的新技术。石英衬底内部复杂的3D通道系统可以直接使用激光通过受控破裂来构建，而高质量的微通道可以通过使用激光诱导的等离子体熔化石英来制造。讨论了激光诱导等离子体在钻孔微通道中的行为。微通道的直径可以控制在25到200nμm之间，通道内壁的平均粗糙度小于0.2umμm。目前，利用激光诱导等离子体可以在熔融石英立方体中获得大于4 mm的微通道。
A novel microchannel fabrication technology for quartz using a Q-switched Nd:YAG laser is presented. Complex 3D channel systems inside quartz substrates can be constructed directly using a laser beam by controlled fracturing, and high-quality microchannels can be fabricated by melting quartz using a laser-induced plasma. The behavior of laser-induced plasmas in drilling microchannels is discussed. The diameter of the microchannels can be controlled from 25 to 200 μm. The average roughness of the interior channel wall is less than 0.2 μm. Currently, microchannels longer than 4 mm in fused-quartz cubes can be achieved using laser-induced plasmas.