Two-dimensional fine particle positioning using a piezoresistive cantilever as a micro/nano-manipulator
Two-dimensional fine particle positioning using a piezoresistive cantilever as a micro/nano-manipulator
复制标题
使用压阻悬臂梁作为微纳机械手进行二维细颗粒定位
DOI：
10.1109/robot.1999.774010
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
H. Hashimoto
中科院分区：
文献类型：
--
作者：
M. Sitti;H. Hashimoto
本文提出了一种利用原子力显微镜中常用的压阻式悬臂梁作为机械手的微粒定位系统。在二维Si衬底上移动尺寸小于3 μ/m的粒子，实现了机械手、粒子和表面之间相互作用力的建模和控制。利用光学显微镜（OM）作为视觉传感器，悬臂梁也作为一个力传感器，使接触检测和表面对准感测。2D OM实时图像反馈构成主用户界面，操作员使用鼠标光标和键盘定义悬臂运动控制器的任务。对2.02 /spl μ/m目标包覆乳胶粒子进行了粒子操纵实验，结果表明该系统可用于二维微粒组装。
In this paper, a fine particle positioning system using a piezoresistive cantilever, which is normally utilized in atomic force microscopy, as the manipulator is proposed. Modeling and control of the interaction forces among the manipulator, particle and surface have been realized for moving particles with sizes less than 3 /spl mu/m on a Si substrate in 2D. Optical microscope (OM) is utilized as the vision sensor, and the cantilever behaves also as a force sensor which enables contact detection and surface alignment sensing. A 2D OM real-time image feedback constitutes the main user interface, where the operator uses mouse cursor and keyboard for defining the task for the cantilever motion controller. Particle manipulation experiments are realized for 2.02 /spl mu/m goal-coated latex particles, and it is shown that the system can be utilized in 2D micro-particle assembling.