Investigation of Elastic Softening and Stiffening Effect of Aluminum Nitride under Stress Loading by Born-Lande Equation
Investigation of Elastic Softening and Stiffening Effect of Aluminum Nitride under Stress Loading by Born-Lande Equation
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DOI：
10.1002/tee.23990
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发表时间：
2023-06
期刊：
影响因子：
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通讯作者：
Cong Chen;Yuwen Lu;Jie Zhang;L. Bai;Jiahao Wang;Yuhua Cheng;Hong Zhou
中科院分区：
文献类型：
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作者：
Cong Chen;Yuwen Lu;Jie Zhang;L. Bai;Jiahao Wang;Yuhua Cheng;Hong Zhou
作为声谐振器和滤波器的核心功能材料，氮化铝（AlN）压电薄膜的弹性及其相关的固有特性值得优先关注。本文深入研究了 AlN 压电薄膜中应力加载引起的弹性软化和硬化效应。基于Born-Lande方程，首次从原子相互作用力的角度定量揭示和定量预测了这种新的本征弹性性质的物理机制。结果发现，在极限应力加载条件下，弹性系数的最大调制范围为（-2.5，-2.5）GPa至（2.5，2.5）GPa，可实现6.7％的最大调制范围。
As a core functional material in acoustic resonators and filters, the elasticity of aluminum nitride (AlN) piezoelectric thin film and its correlated intrinsic properties deserve priority attention. This paper presents an in-depth investigation of elastic softening and stiffening effect induced by stress loading in AlN piezoelectric thin film. Based on the Born-Lande equation, the physical mechanism of such new intrinsic elastic property is revealed and predicted quantitatively for the first time from the perspective of atomic interaction forces. It is found that a maximum 6.7% modulation range of elasticity coefficient can be achieved under ultimate stress loading conditions from (-2.5, -2.5) GPa to (2.5, 2.5) GPa.