Micro-fabrication process of vapor cells for chip-scale atomic clocks
Micro-fabrication process of vapor cells for chip-scale atomic clocks
复制标题
芯片级原子钟蒸汽室的微加工工艺
DOI：
10.3788/col201917.040202
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发表时间：
2019-04
影响因子：
3.5
通讯作者：
Yan Shubin
中科院分区：
文献类型：
--
作者：
Zhang Yanjun;Li Yunchao;Hu Xuwen;Zhang Lu;Liu Zhaojun;Zhang Kaifang;Mou Shihao;Zhang Shougang;Yan Shubin
作为芯片级原子钟（CSAC）的关键部件，蒸汽室直接决定了CSAC的体积、稳定性和功耗。降低功耗和CSAC体积需要制造相应的蒸汽电池。本文综述了近年来国内外对蒸汽电池的研究进展，并分析了现有制备技术的不足。通过比较几种不同的蒸汽电池制备方法，我们成功地实现了阳极键合和深硅刻蚀的蒸汽电池的微制造。这种电池制造方法简单有效，避免了在高温下阳极键合过程中碱金属挥发导致的键合强度弱。最后，通过光吸收共振对蒸气室D2线进行了表征。结果表明，该方法适用于CSAC。
As the key part of chip-scale atomic clocks (CSACs), the vapor cell directly determines the volume, stability, and power consumption of the CSAC. The reduction of the power consumption and CSAC volumes demands the manufacture of corresponding vapor cells. This overview presents the research development of vapor cells of the past few years and analyzes the shortages of the current preparation technology. By comparing several different vapor cell preparation methods, we successfully realized the micro-fabrication of vapor cells using anodic bonding and deep silicon etching. This cell fabrication method is simple and effective in avoiding weak bonding strengths caused by alkali metal volatilization during anodic bonding under high temperatures. Finally, the vapor cell D2 line was characterized via optical-absorption resonance. According to the results, the proposed method is suitable for CSAC.