Highly Sensitive Air Pressure Sensor Based on Fabry-Perot Interference
Highly Sensitive Air Pressure Sensor Based on Fabry-Perot Interference
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DOI：
10.1109/jsen.2022.3152045
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发表时间：
2022-04-01
影响因子：
4.3
通讯作者：
Jiang, Qi
中科院分区：
文献类型：
--
作者：
Zhang, Hongzhu;Jiang, Qi
提出并演示了一种基于法布里-珀罗干涉仪的高灵敏度光纤气压传感器。传感器采用平切单模光纤、毛细管玻璃管、不锈钢套筒、尼龙衬底、金属铝膜等材料制成。利用COMSOL Multiphysics软件分两步进行有限元模拟。第一步，利用结构力学模块模拟膜在固定压力下的变形，从而得到不同压力下对应的传感器空腔长度。第二步，利用波光学模块得到传感器在不同空腔长度下的反射光谱。然后得到传感器反射光谱位移与压力之间的线性关系。因此，传感器在气压下的平均光谱灵敏度为-3.10335 nm/KPa。制作了金属-铝薄膜F-P腔传感器进行实验验证。实验结果表明，当气压在0 ~ 1000 Pa范围内时，传感器的光谱灵敏度高达-3.10 nm/KPa。这与仿真结果基本一致。该传感器在气道压力测量和环境监测等领域具有潜在的应用前景。
A highly sensitive optical fiber air pressure sensor based on Fabry-Perot interferometer is proposed and demonstrated. The sensor is fabricated by flat-cut single-mode optical fiber, capillary glass tube, stainless steel sleeve, nylon substrate, and metal aluminum film. The finite element simulation was performed in two steps using the COMSOL Multiphysics software. In the first step, the structural mechanics module is used to simulate the deformation of the membrane under a fixed pressure, so as to obtain the corresponding sensor cavity lengths under different pressure. In the second step, the wave optics module is used to get the reflection spectrum of the sensor under different cavity lengths. Then the linear relationship between the reflection spectral shift of the sensor and the pressure is obtained. Thus, the average spectral sensitivity of the sensor under air pressure is -3.10335 nm/KPa. A metal-aluminum thin film F-P cavity sensor was fabricated for experimental verification. According to the experimental results, when the air pressure ranges from 0 Pa to 1000 Pa, the spectral sensitivity of the sensor is as high as -3.10 nm/KPa. This is almost consistent with the simulation result. The sensor has exhibited potential application in the fields of measurement of airway pressure and environmental monitoring.