Enhanced mechanical performance of AlN/nanodiamond micro-resonators
Enhanced mechanical performance of AlN/nanodiamond micro-resonators
复制标题
增强 AlN/纳米金刚石微谐振器的机械性能
DOI：
10.1088/0960-1317/23/12/125017
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发表时间：
2013
影响因子：
2.3
通讯作者：
V. Lebedev
中科院分区：
文献类型：
--
作者：
N. Heidrich;J. Hees;W. Pletschen;R.E. Sah;L. Kirste;V. Zuerbig;C. Nebel;O. Ambacher;V. Lebedev
微机电系统是一个密集的研究问题，旨在取代未来射频通信设备中的硅和III-V族半导体器件。由于其独特的材料特性，结合掺杂纳米晶金刚石（NCD）和AlN薄膜的微结构是有前途的压电驱动微系统，以提高工作频率。在这项工作中，单和双钳位的单压电晶片NCD上的AlN微谐振器的制造，然后通过激光振动仪对它们的弯曲谐振频率在0.1-20 MHz的范围内，以推断其机械性能。AlN压电致动器的结构特性的增强与纳米金刚石电极的先进弹性相结合导致所得到的单晶片的上级机械参数。这些允许弯曲谐振微系统的制造具有扩展工作频率远高于1 GHz的潜力。
Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III–V semiconductor-based components in prospective radio frequency communication devices. Due to their unique material properties, microstructures combining doped nano-crystalline diamond (NCD) and AlN thin films are promising for piezo-actuated microsystems in order to increase operating frequencies. In this work, single and doubly clamped unimorph NCD-on-AlN micro-resonators were fabricated and then characterized by laser vibrometry towards their flexural resonant frequencies in the range of 0.1–20 MHz to deduce their mechanical properties. Enhancements in the structural properties of an AlN piezo-actuator united with an advanced elasticity of nano-diamond electrode lead to superior mechanical parameters of the resulting unimorphs. These allow for the fabrication of flexural resonant microsystems with a potential to extend the operating frequencies well above 1 GHz.