Silicon microring resonators with 1.5-μm radius
Silicon microring resonators with 1.5-μm radius
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DOI：
10.1364/oe.16.004309
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发表时间：
2008-03-17
期刊：
影响因子：
3.8
通讯作者：
Beausoleil, Raymond G.
中科院分区：
文献类型：
--
作者：
Xu, Qianfan;Fattal, David;Beausoleil, Raymond G.
我们展示了一个硅带波导和超紧凑的硅微谐振器，最大限度地减少杂散光散射，并增加了几何形状的临界尺寸之间的结。我们展示了半径约为1.5 μ m，有效模体积约为1.0 μ m（3）的级联硅微谐振器，它们与耦合Q值高达9000的波导临界耦合。1.5 μ m的半径小于工作波长，接近相同Q值硅微环谐振器的理论尺寸极限。该器件是利用广泛使用的基于SEM的光刻系统，使用基于U形波导的无光刻设计制造的。(c)2008年美国光学学会。
We demonstrate a junction between a silicon strip waveguide and an ultra-compact silicon microring resonator that minimizes spurious light scattering and increases the critical dimensions of the geometry. We show cascaded silicon microring resonators with radii around 1.5 mu m and effective mode volumes around 1.0 mu m(3) that are critically coupled to a waveguide with coupled Q's up to 9,000. The radius of 1.5 mu m is smaller than the operational wavelength, and is close to the theoretical size limit of the silicon microring ring resonator for the same Q. The device is fabricated with a widely-available SEM-based lithography system using a stitch-free design based on a U-shaped waveguide. (c) 2008 Optical Society of America.