Tamoya KENMOCHI, Takahashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI: "Study on Subsurface Defects Measurement of Silicon-wafer by Infrared Evanescent Wave"Proceedings of 2000 JSPE general meeting in spring. 602 (2000)
Tamoya KENMOCHI, Takahashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI: "Study on Subsurface Defects Measurement of Silicon-wafer by Infrared Evanescent Wave"Proceedings of 2000 JSPE general meeting in spring. 602 (2000)
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Tamoya KENMOCHI、Takahashi MIYOSHI、Yasuhiro TAKAYA、Satoru TAKAHASHI:“红外倏逝波硅片表面缺陷测量研究”2000年JSPE春季会员大会论文集。
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