A New Technique Keeping off the Mn Evaporant from Oxygen Atmosphere during Reactive Evaporation Process
A New Technique Keeping off the Mn Evaporant from Oxygen Atmosphere during Reactive Evaporation Process
复制标题
反应蒸发过程中锰蒸发物与氧气氛隔绝的新技术
DOI：
10.1143/jjap.40.5069
复制
发表时间：
2001
影响因子：
1.5
通讯作者：
H. Fujiyasu
中科院分区：
文献类型：
--
作者：
M. Isai;T. Shimada;T. Matsui;H. Fujiyasu
采用反应蒸发法制备了锂二次电池用氧化锰薄膜。反应蒸发过程中，坩埚中的金属Mn会发生严重氧化，随着沉积次数的增加，其沉积速率会降低。也很难保持膜的化学计量从运行到运行。本文介绍了一种在反应蒸发过程中使锰蒸发液与氧气隔离的新技术。为了实现这一目标，在锰坩埚的底部安装了一个不锈钢池，它可以成功地将锰蒸发物与进入的氧原子隔离开来。由于沉积速率的稳定，它改善了膜组成的再现性。
Manganese oxide films for lithium secondary batteries were prepared using a reactive evaporation method. The Mn metal in the crucible suffers severe oxidation during the reactive evaporation process, which deteriorates it's deposition rate with increasing deposition run. It is also difficult to maintain the stoichiometry of films from run to run. This paper shows a new technique which keeps off the Mn evaporant from oxygen atmosphere during the reactive evaporation process. To achieve it a stainless steel cell has been installed in the bottom of the Mn crucible, which can successfully isolate Mn evaporant from incoming oxygen atoms. It improves the reproducibility of film composition because of stabilizing of the deposition rate.