Polymer-based Photonic Crystal Cavity Sensor for Optical Detection in the Visible Wavelength Region

Polymer-based Photonic Crystal Cavity Sensor for Optical Detection in the Visible Wavelength Region
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DOI:
10.2116/analsci.32.117
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发表时间:
2016-01-01
影响因子:
1.6
通讯作者:
Endo, Tatsuro
Endo, Tatsuro
中科院分区:
化学4区
文献类型:
--
作者:
Maeno, Kenichi;Axi, Shoma;Endo, Tatsuro

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本研究首次设计并制作了一种用于可见光传感的聚合物基二维光子晶体腔。PhC腔配置被设计为在650 nm处操作,并且使用电子束光刻在硅衬底上用聚合物(抗蚀剂)制造。为了研究基于呈现光子带隙(PBG)的条件的移动的传感应用,监测聚合物单层沉积(逐层方法)作为腔位置处的光强度变化。从而实现了对聚离子的单分子层检测。
In this study, a polymer-based two-dimensional photonic crystal (PhC) cavity for visible-light-based optical-sensing applications was designed and fabricated for the first time. The PhC cavity configuration was designed to operate at 650 nm, and fabricated with a polymer (resist) on a silicon substrate using electron-beam lithography. For investigating sensing applications based on shifting of condition exhibiting a photonic bandgap (PBG), the polymer monolayer deposition (layer-by-layer method) was monitored as the light-intensity change at the cavity position. Consequently, the monolayer-level detection of polyions was achieved.