Simulation and design optimization of transparent heaters for spectroscopic micro cells
Simulation and design optimization of transparent heaters for spectroscopic micro cells
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DOI：
10.1117/12.2017166
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发表时间：
2013-05
期刊：
影响因子：
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通讯作者：
H. Völlm;J. Herrmann;R. Maier;D. Feili;V. Häublein;H. Ryssel;H. Seidel
中科院分区：
文献类型：
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作者：
H. Völlm;J. Herrmann;R. Maier;D. Feili;V. Häublein;H. Ryssel;H. Seidel
对于一些应用，微电池具有均匀的温度分布和至少一个光学端口是必需的。这些细胞的一个例子是芯片级原子钟的物理包。有必要使用低能耗加热器将微室均匀加热到353k。在这项工作中，研究透明加热结构来实现这一目标。首先用解析的方法描述了加热结构的热耗散行为。然后对可能的加热器结构的不同方法进行了仿真，以找到最优的基本配置。此外，优化了这种结构以获得整个电池内均匀的温度分布。
For several applications, micro cells with a uniform temperature profile and at least one optical port are required. One example for those cells is the physics package of a chip-scale-atomic-clock. It is necessary that the micro chambers are heated homogeneously to 353 K using a low energy consumption heater. In this work transparent heating structures are investigated to achieve this goal. First an analytical approach is used to describe the behavior of thermal energy dissipation of the heating structures. Then different approaches of possible heater structures are simulated to find the optimal basic configuration. Furthermore, this configuration is optimized to obtain a uniform temperature distribution in the whole cell.