Highly Sensitive Ball Surface Acoustic Wave Hydrogen Sensor with Porous Pd-Alloy Film
Highly Sensitive Ball Surface Acoustic Wave Hydrogen Sensor with Porous Pd-Alloy Film
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DOI：
10.2320/matertrans.i-m2014816
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发表时间：
2014-07
影响因子：
1.2
通讯作者：
T. Tsuji;Ryosuke Mihara;Tomohiro Saito;Satoshi Hagihara;T. Oizumi;N. Takeda;T. Ohgi;T. Yanagisawa;S. Akao;N. Nakaso;K. Yamanaka
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文献类型：
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作者：
T. Tsuji;Ryosuke Mihara;Tomohiro Saito;Satoshi Hagihara;T. Oizumi;N. Takeda;T. Ohgi;T. Yanagisawa;S. Akao;N. Nakaso;K. Yamanaka
为了普遍使用爆炸性H2气体作为能源，需要快速、灵敏、低功耗的传感器。为了实现这种传感器，我们研制了一种带有多孔Pd-Pt合金薄膜的球形表面声波传感器。采用20% Pt合金膜的传感器可有效抑制Pd的相变，并在35℃下检测ppm阶浓度。振幅响应与浓度的平方根成正比，这在声表面波传感器领域首次得到证实，在信噪比为3时的检测限为3.7ppm。与室温下工作的H2传感器相比，响应时间缩短至1/5。结果表明，采用多孔Pd合金薄膜的球形SAW传感器可以实现室温下工作速度最快、灵敏度最高的氢传感器。(doi: 10.2320 / matertrans.I-M2014816)
In order to commonly use explosive H2 gas as an energy source, fast, sensitive, and low-power consumption sensor is required. We developed a ball surface acoustic wave (SAW) sensor with porous PdPt alloy film to realize such a sensor. The sensor with 20% Pt alloying film was useful for the suppression of a phase transition of Pd and the detection of ppm order concentration at 35°C. The amplitude response was proportional to the square root of the concentration, which was demonstrated for the first time in the field of SAW sensor, resulting in the detection limit of 3.7ppm at signal to noise ratio of 3. The response time decreased to 1/5, compared with those of pioneering H2 sensors working at room temperature. From these results, it was shown that the fastest and most sensitive hydrogen sensor working at room temperature could be realized using the ball SAW sensor with porous Pd alloy film. [doi:10.2320/matertrans.I-M2014816]