Micromechanical switches fabricated using nickel surface micromachining
Micromechanical switches fabricated using nickel surface micromachining
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DOI：
10.1109/84.557524
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发表时间：
1997-03
期刊：
影响因子：
--
通讯作者：
P. Zavracky;S. Majumder;N. McGruer
中科院分区：
文献类型：
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作者：
P. Zavracky;S. Majumder;N. McGruer
微机械开关已采用四层表面微加工工艺在电镀镍中制成。最简单的器件配置有三个端子，即源极、漏极和栅极，宽30μm，厚1μm，长65μm。在栅极和源极之间施加电压可闭合开关，将源极与漏极连接起来。器件在失效前可切换超过10⁹次循环，并表现出高达5 mA的长寿命热切换电流。初始接触电阻小于50 mΩ。源极和漏极之间的击穿（耐压）电压大于100 V，在100 V时关断电流小于20 fA。
Micromechanical switches have been fabricated in electroplated nickel using a four-level surface micromachining process. The simplest devices are configured with three terminals, a source, a drain, and a gate and are 30 /spl mu/m wide, 1 /spl mu/m thick, and 65 /spl mu/m long. A voltage applied between the gate and source closes the switch, connecting the source to the drain. Devices switch more than 10/sup 9/ cycles before failure and exhibit long-lifetime hot switching currents up to 5 mA. The initial contact resistance is less than 50 m/spl Omega/. The breakdown (stand-off) voltage between the source and the drain is greater than 100 V and the off-current is less than 20 fA at 100 V.