Discussion on Population Kinetics and Number Densities of Excited Species of Low-Pressure Discharge Nitrogen Plasma
Discussion on Population Kinetics and Number Densities of Excited Species of Low-Pressure Discharge Nitrogen Plasma
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DOI：
10.1002/tee.22230
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发表时间：
2016-06-01
影响因子：
1
通讯作者：
Nezu, Atsushi
中科院分区：
文献类型：
--
作者：
Akatsuka, Hiroshi;Shibata, Tomohiko;Nezu, Atsushi
本文建立了一个数值模型，计算了低压放电氮等离子体中氮的几种激发态粒子的数密度，同时求解了自洽的电子能量分布函数和N-2振动分布函数。我们考虑N-2（X）、N-2（A）、N-2（B）、N-2（C）、N-2（a）、N-2（a '）、N-2（+）、N-4（+）、N（S-4）和e（-）。除了电子碰撞反应，扩散损失和分子关系也包括在内。发现N-2（B）和N-2（C）态的数密度比可以很好地度量电子动力学温度。发现N-2（C）态几乎处于电晕平衡，而N-2（B）态主要由N-2（X，v ≥ 6）+ N-2（A）反应布居，基态N-2（X）分子的碰撞弛豫使其布居减少。(C)2016年，日本电气工程师协会。出版社：John Wiley & Sons，Inc.
A numerical model is constructed to calculate the number densities of some excited species of nitrogen in low-pressure discharge nitrogen plasma, together with simultaneous solution of the self-consistent electron energy distribution function and N-2-vibration distribution function. We consider species N-2(X), N-2(A), N-2(B), N-2(C), N-2(a), N-2(a'), N-2(+), N-4(+), N(S-4) and e(-). In addition to electron collisional reactions, diffusion losses and molecular relations are included. It is found that the ratio of number densities of N-2(B) and N-2(C) states can be a good measure of the electron kinetic temperature. The N-2(C) state is found to be almost in a corona equilibrium, whereas the N-2(B) state becomes mainly populated by N-2(X, v >= 6) + N-2(A) reaction and depopulated by collisional relaxation by the ground-state N-2(X) molecule. (C) 2016 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.