A Linear Scheme for the Displacement Analysis of Micropositioning Stages with Flexure Hinges
A Linear Scheme for the Displacement Analysis of Micropositioning Stages with Flexure Hinges
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DOI：
10.1115/1.2919449
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发表时间：
1994-09
影响因子：
3.3
通讯作者：
I. Her;J. Chang
中科院分区：
文献类型：
--
作者：
I. Her;J. Chang
在本文中，我们提出了一种用于带有挠性铰链的微定位平台的位移分析的分析方案。所提出的方案基于平台结构的几何约束方程的线性化。本文还提出了评估柔性铰链刚度的设计图。该图表提供了比目前使用的设计公式更准确的估计。所提出的线性方案通用、易于使用，并且能够获得与有限元分析接近的结果。
In this paper we present an analytical scheme for the displacement analysis of micropositioning stages with flexure hinges. The proposed scheme is based on linearization of the geometric constraint equations of the stage structure. A design chart for evaluating the stiffness of the flexure hinge is also presented in this paper. This chart provides more accurate estimations than the design formula presently in use. The proposed linear scheme is general, easy to use, yet capable of obtaining results close to those obtained from the finite element analysis.