Preparation of Barium Titanate Thin Film on Titanium-Deposited Glass Substrate by Hydrothermal-Electrochemical Method
Preparation of Barium Titanate Thin Film on Titanium-Deposited Glass Substrate by Hydrothermal-Electrochemical Method
复制标题
水热电化学法在钛沉积玻璃基板上制备钛酸钡薄膜
DOI：
10.2109/jcersj.98.930
复制
发表时间：
1990
影响因子：
1.1
通讯作者：
M. Yoshimura
中科院分区：
文献类型：
--
作者：
M. Hayashi;N. Ishizawa;Seung;M. Yoshimura
通过水热电化学反应在钛沉积玻璃基板上在足够低的温度下制备了结晶良好的多晶钛酸钡薄膜。该反应在0.1-0.5N Ba(OH)2 溶液中，在100℃-200℃的温度和饱和蒸气压下进行，使用钛沉积玻璃基板作为阳极，Pt板作为阴极，并施加高达18mA/cm2的恒流电流。 BaTiO3 薄膜有光泽且致密。根据重量变化估算的薄膜厚度从70nm增加到300nm，在200℃、0.5N Ba(OH)2溶液中、电流密度为15mA/cm2的处理时间从10分钟增加到60分钟。 BaTiO3 薄膜与玻璃基板的粘附力非常强，没有观察到剥落现象。在不通电的水热条件下形成了类似的厚度小于70nm的BaTiO3薄膜。
Well-crystallized polycrystalline barium titanate thin films have been prepared at sufficiently low temperatures by the hydrothermal-electrochemical reaction on titanium-deposited glass substrates. The reaction was carried out in 0.1-0.5N Ba(OH)2 solutions at temperatures of 100°-200°C and under saturated vapor pressures, using a titanium-deposited glass substrate for anode and a Pt plate for cathode and applying an electric current galvanostatically up to 18mA/cm2. The BaTiO3 film was lustrous and dense. The thickness of the film estimated from the weight change increased from 70 to 300nm with treatment time from 10 to 60min at 200°C in 0.5N Ba(OH)2 solution with the current density of 15mA/cm2. The adhesion of the BaTiO3 film to the glass substrate was so strong that no exfoliation was observed. Similar BaTiO3 thin films with thickness less than 70nm were formed under hydrothermal conditions without electricity.