Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition
Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition
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DOI：
10.1116/1.1326940
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发表时间：
2001-01-01
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影响因子：
--
通讯作者：
Egerton, RF
中科院分区：
文献类型：
--
作者：
Malac, M;Egerton, RF
We have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices. (C) 2001 American Vacuum Society. [DOI: 10.1116/1.1326940].
