Fabrication and characterization of micropatterned barium titanate ceramics
Fabrication and characterization of micropatterned barium titanate ceramics
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DOI：
10.1007/s10832-007-9082-x
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发表时间：
2008-12
影响因子：
1.7
通讯作者：
Y. Wu;Juan Li;M. Kuwabara
中科院分区：
文献类型：
--
作者：
Y. Wu;Juan Li;M. Kuwabara
研究了一种结合电子束（EB）光刻和电泳沉积（EPD）的微图形化钛酸钡（BaTiO 3）薄膜的新图形化方法。首先，采用电子束光刻技术在Pt/Ti/Si衬底上制备了高分辨率的光刻胶模具。然后，以2-甲氧基乙醇和乙酰丙酮的体积比为9：1的混合溶剂为分散介质，采用电泳沉积法，将单分散的BaTiO 3纳米粒子悬浮在基底上。通过高浓度溶胶-凝胶法在90 °C的低温下合成了平均粒径约为10 nm的纳米颗粒。多余的抗蚀剂模具上沉积的EPD层进行机械抛光，然后通过化学去除抗蚀剂去除剂中的模具，留下微图案的钛酸钡纳米粒子的基板上，最后烧结产生微图案的钛酸钡陶瓷薄膜。该方法可用于制备其他微图案化的电子陶瓷薄膜。
A new patterning method combining electron beam (EB) lithography and electrophoretic deposition (EPD) for fabricating micropatterned barium titanate (BaTiO3) thin films was investigated. At first, resist molds with high resolution were prepared using EB lithography on Pt/Ti/Si substrates. Then BaTiO3nanoparticles were deposited on the substrates by EPD from a transparent suspension of monodispersed BaTiO3nanoparticles; a mixed solvent of 2-methoxyethonal and acetylacetone with a 9:1 volumetric ratio was used as a dispersion medium. The nanoparticles with an average size of about 10 nm were synthesized at a low temperature of 90 °C by a high concentration sol-gel process. EPD layers superfluously deposited on the resist molds were mechanically polished away, followed by chemically removing the molds in a resist remover to leave micropatterns of BaTiO3nanoparticles on the substrates, which were finally sintered to yield micropatterned BaTiO3ceramic thin films. The method developed may be used to fabricate other micropatterned electroceramic thin films.