Elastic-property measurements of ultrathin films using atomic force acoustic microscopy
Elastic-property measurements of ultrathin films using atomic force acoustic microscopy
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DOI：
10.1088/0957-4484/16/6/013
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发表时间：
2005-06-01
期刊：
影响因子：
3.5
通讯作者：
Hurley, DC
中科院分区：
文献类型：
--
作者：
Kopycinska-Müller, M;Geiss, RH;Hurley, DC
原子力声学显微镜(AFAM)是一种新兴的纳米级横向和深度分辨技术，被用来测量超薄膜的弹性性质。我们测量了三种厚度分别为50、200和800 nm的镍膜的压痕模数M。与传统的纳米压痕等方法相比，AFAM的结果不受硅衬底的任何影响，即使对于50 nm的薄膜也是如此。X射线衍射和扫描电子显微镜结果表明，薄膜为纳米晶，具有较强的(111)择优取向。M值在210到223 Gpa之间，低于散装镍的预期。弹性模量值的降低可能归因于纳米晶薄膜中的颗粒尺寸效应。
Atomic force acoustic microscopy (AFAM), an emerging technique that affords nanoscale lateral and depth resolution, was employed to measure the elastic properties of ultrathin films. We measured the indentation modulus M of three nickel films approximately 50, 200, and 800 nm thick. In contrast to conventional methods such as nano indentation, the AFAM results remained free of any influence of the silicon substrate, even for the 50 nm film. X-ray diffraction and scanning electron microscopy results indicated that the films were nanocrystalline with a strong preferred (111) orientation. Values of M ranged from 210 to 223 GPa, lower than expected from values for bulk nickel. The reduced values of the elastic modulus may be attributed to grain-size effects in the nanocrystalline films.