Terahertz monolithic integrated coplanar band‐pass filter based on slotline mode
Terahertz monolithic integrated coplanar band‐pass filter based on slotline mode
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DOI：
10.1002/mop.33498
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发表时间：
2022-11
影响因子：
1.5
通讯作者：
Yuchen Liu;Lin-An Yang;Yang Li;Siyu Liu;Yue Hao
中科院分区：
文献类型：
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作者：
Yuchen Liu;Lin-An Yang;Yang Li;Siyu Liu;Yue Hao
本文提出了一种基于共面波导谐振器的太赫兹单片集成平面带通滤波器。通过采用槽线形式的馈电线，消除了传统CPW滤波器中对空气桥的需要，实现了良好的可集成性并降低了制造难度。为了进一步提高滤波性能，设计中采用了缺陷地结构，在下边带引入了有限传输零点。该滤波器在半绝缘碳化硅（SiC）衬底上制造，以适应现有先进的GaN-on-SiC单片集成系统。测量结果显示，在279 GHz的中心频率下，分数带宽为5.7%，插入损耗为5.1 dB。该滤波器的体积为500 × 400 × 50 μm（0.45 × 0.36 × 0.045 λ0），有效地提高了平面滤波器在太赫兹波段的性能。
In this letter, a terahertz monolithic integrated planar band‐pass filter based on coplanar waveguide (CPW) resonators has been proposed. By adopting the feeding line in form of a slotline, the need for air‐bridges in traditional CPW filters is eliminated, achieving good integrability and reducing fabrication difficulty. To further improve the filtering performance, the defected ground structure is used in the design, introducing a finite transmission zero at the lower sideband. The filter is manufactured on the semi‐insulation silicon carbide (SiC) substrate, to fit the existing advanced GaN‐on‐SiC monolithic integration system. Measurement reveals the fractional band‐width of 5.7% at the center frequency of 279 GHz, with an insertion loss of 5.1 dB. With a volume of 500 × 400 × 50 μm (0.45 × 0.36 × 0.045 λ0), the proposed filter improves the performance of the planar filter operating at the terahertz band effectively.