Analysis of the High-Frequency Impedance of Micromachined Film ( Instrument・ Magnetics)
Analysis of the High-Frequency Impedance of Micromachined Film ( Instrument・ Magnetics)
复制标题
微机械薄膜的高频阻抗分析（仪器・磁学）
DOI：
10.3379/jmsjmag.21.789
复制
发表时间：
1997
影响因子：
--
通讯作者：
K. Arai
中科院分区：
文献类型：
--
作者：
H. Kikuchi;M. Takezawa;M. Yamaguchi;K. Arai
分析了微机械软磁薄膜的高频阻抗特性。阻抗根据易磁化轴取向和待感测的直流磁场的方向而变化。CoZrNb薄膜的研究表明，磁导率随外加直流磁场的变化可以用偏置磁化率理论来解释。此外，微机械薄膜的阻抗的变化可以定量估计的基础上的直流场依赖的磁导率。
This paper reports an analysis of the high-frequency impedance of micromachined soft-magnetic thin films. The impedance changes according to the directions of the easy axis orientation and the dc magnetic field to be sensed. Investigation of CoZrNb films clarified that the change in permeability with the applied dc magnetic field can be explained by the bias susceptibility theory. Moreover, the change in the impedance of micromachined films can be estimated quantitatively on the basis of the dc field dependence of the permeability.