Easy and quick measurements of electron temperature and plasma density by a sheath compensated Langmuir probe

Easy and quick measurements of electron temperature and plasma density by a sheath compensated Langmuir probe
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通过鞘补偿朗缪尔探头轻松快速地测量电子温度和等离子体密度

DOI：
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发表时间：
2014
期刊：
Proceedings of the 8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
影响因子：
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通讯作者：
and Akira Ando
and Akira Ando
中科院分区：
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文献类型：
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作者：
Kazunori Takahashi;Hiroki Higashiyama;Koichi Takaki;and Akira Ando

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