Effect of crystal structure on optical properties of sol-gel derived zirconia thin films
Effect of crystal structure on optical properties of sol-gel derived zirconia thin films
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晶体结构对溶胶-凝胶法氧化锆薄膜光学性能的影响
DOI：
10.1016/j.jallcom.2012.12.115
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发表时间：
2013-04-15
影响因子：
6.2
通讯作者：
Shen, Jun
中科院分区：
文献类型：
--
作者：
Wang, Xiaodong;Wu, Guangming;Shen, Jun
本文研究了溶胶-凝胶法制备的氧化锆薄膜的光学性质及其与晶体结构的关系。采用溶胶-凝胶法在石英玻璃和硅片上制备了ZrO 2薄膜，并分别采用常规炉退火（CFA）和快速热退火（RTA）工艺制备了ZrO 2薄膜。通过X射线衍射（XRD）和拉曼光谱分析了薄膜的晶体结构，并通过反射光谱和透射光谱确定了薄膜的折射率。薄膜的折射率随薄膜的晶体结构和密度的变化而变化，这取决于退火温度和退火工艺。发现单斜相和四方相之间的晶格失配降低了ZrO 2薄膜的折射率。(C)2012爱思唯尔有限公司版权所有。
The optical properties of sol-gel derived zirconia thin films and their relation to the crystal structure are studied in this paper. ZrO2 films were deposited on quartz glass and silicon wafer substrates by sol-gel method with conventional furnace annealing (CFA) and rapid thermal annealing (RTA). Crystal structures of the films were analyzed by X-ray diffraction (XRD) and Raman spectroscopy, while refractive indices of the films were determined from the reflectance and transmittance spectra. The refractive indices vary with the function of crystal structure and density of the films, which depends on annealing temperature and annealing technique. Lattice-mismatch between monoclinic phase and tetragonal phase was found to reduce the refractive index of ZrO2 films. (C) 2012 Elsevier B.V. All rights reserved.