Micromachined In-Plane Pressure-Gradient Piezoelectric Microphones
Micromachined In-Plane Pressure-Gradient Piezoelectric Microphones
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DOI：
10.1109/jsen.2014.2361118
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发表时间：
2015-03-01
影响因子：
4.3
通讯作者：
Hall, Neal A.
中科院分区：
文献类型：
--
作者：
Kuntzman, Michael L.;Hewa-Kasakarage, Nishshanka N.;Hall, Neal A.
本文介绍了微机械压电定向麦克风的制造、建模和表征。该麦克风结构由 20 微米厚的半刚性梁结构组成，该结构围绕扭转枢轴旋转，以响应梁长度上的面内压力梯度。梁结构的运动由压电悬臂转换，当结构旋转时压电悬臂会偏转。虽然该结构已在之前的出版物中介绍过，但这是第一篇总结第一代原型严格声学特性的论文。提出了利用有限元分析进行参数提取的分析模型和多模式、多端口网络模型，并与声学灵敏度测量进行了比较。方向性测量根据多模模型进行解释。提出了传感器和读出电子器件的噪声模型并与测量结果进行了比较。
This paper presents the fabrication, modeling, and characterization of a micromachined piezoelectric directional microphone. The microphone structure consists of a 20-mu m-thick semirigid beam structure that rotates about torsional pivots in response to in-plane pressure gradients across the length of the beam. The motion of the beam structure is transduced by piezoelectric cantilevers, which deflect when the structure rotates. While the structure has been introduced in prior publications, this is the first paper summarizing rigorous acoustic characterization of first generation prototypes. An analytical model and multimode, multiport network model utilizing finite-element analysis for parameter extraction are presented and compared with acoustic sensitivity measurements. Directivity measurements are interpreted in terms of the multimode model. A noise model for the sensor and readout electronics is presented and compared with measurements.