Passive Temperature Stabilization System for MEMS Sensors Performance Maintenance
Passive Temperature Stabilization System for MEMS Sensors Performance Maintenance
复制标题
用于 MEMS 传感器性能维护的无源温度稳定系统
DOI:
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发表时间:
2020
期刊:
影响因子:
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通讯作者:
Hosei NAGANO and Susumu HARA
中科院分区:
文献类型:
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作者:
Kikuko MIYATA;Hosei NAGANO and Susumu HARA