High aspect-ratio micromachining of polymers with an ultrafast laser
High aspect-ratio micromachining of polymers with an ultrafast laser
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DOI：
10.1016/s0169-4332(01)00673-0
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发表时间：
2002-01
影响因子：
6.7
通讯作者：
Y. Zhang;R. M. Lowe;E. Harvey;P. Hannaford;A. Endo
中科院分区：
文献类型：
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作者：
Y. Zhang;R. M. Lowe;E. Harvey;P. Hannaford;A. Endo
用波长为800 nm的100 fs激光脉冲束研究了各种聚合物的激光烧蚀。对于由平凸透镜聚焦的光束，实现了直径20-40μm、深度300-400μm（纵横比大于10）的孔的高质量加工。当用矩形针孔进行投影图案化时，已经在样品的大部分深处观察到微串阵列。微弦的直径小至2μm（约为波长的三倍），长度大于10 mm（纵横比5000）。讨论了高纵横比的实现和微弦阵列的形成。
Laser ablation of various polymers has been studied using a beam of 100fs laser pulses at a wavelength of 800nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20–40μm and depths 300–400μm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2μm (about three times the wavelength) and lengths greater than 10mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed.