Fabrication and measurement of nanostructures on the micro ball surface using a modified atomic force microscope.
Fabrication and measurement of nanostructures on the micro ball surface using a modified atomic force microscope.
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DOI：
10.1063/1.4758997
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发表时间：
2012-11
期刊：
影响因子：
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通讯作者：
Xuesen Zhao;Yanquan Geng;W. B. Li;Yongda Yan;Z. Hu;Tong Sun;Y. Liang;S. Dong
中科院分区：
文献类型：
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作者：
Xuesen Zhao;Yanquan Geng;W. B. Li;Yongda Yan;Z. Hu;Tong Sun;Y. Liang;S. Dong
为了在微球表面进行机加工和测量纳米结构，建立了一种基于此系统的动作，将商业AFM系统与家用精密空气轴承轴结合在一起。基于AFM尖端的纳米机械加工方法，将空调主轴控制在微球上的机器纳米结构。通过提供的精细调整方法将1000纳米线阵列，36平方坑结构，10平方坑结构以及直径为1.5 mm的微球周围的锯齿状结构降低至3-4μm。成功进行了加工。对于他们的分布，这项工作是修改微球轮廓和球形调制目标的有用尝试，以研究内爆微球的实验性能。
In order to machine and measure nanostructures on the micro ball surface, a modified atomic force microscope (AFM) combining a commercial AFM system with a home built precision air bearing spindle is established. Based on this system, motions of both the AFM scanner and the air bearing spindle are controlled to machine nanostructures on the micro ball based on the AFM tip-based nano mechanical machining approach. The eccentric error between the axis of the micro ball and the axis of the spindle is reduced to 3-4 μm by the provided fine adjusting method. A 1000 nano lines array, 36 square pits structure, 10 square pits structure, and a zig-zag structure on the circumference of the micro ball with the diameter of 1.5 mm are machined successfully. The measurement results achieved by the same system reveal that the profiles and mode-power spectra curves of the micro ball are influenced by the artificially machined nanostructures significantly according to their distributions. This work is an useful attempt for modifying the micro ball profile and manufacture of the spherical modulation targets to study the experimental performance of the micro ball in implosion.