Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization
Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization
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DOI：
10.1364/opex.14.000800
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发表时间：
2006-01-23
期刊：
影响因子：
3.8
通讯作者：
Kawata, S
中科院分区：
文献类型：
--
作者：
Formanek, F;Takeyasu, N;Kawata, S
提出了一种实现大面积三维周期性金属微/纳米结构的实验方案。同时制造数百个三维复杂的聚合物结构，实现了使用双光子光聚合（TPP）技术结合微透镜阵列。结构的金属化通过化学镀沉积薄且高导电性的膜来进行。实现了可光聚合树脂的化学改性和在支撑结构的玻璃表面上产生疏水涂层。该工艺防止金属沉积在基板上并限制聚合物上的粘附。我们的技术可以产生任意形状的周期性和/或孤立的金属结构，由700多个并行写入的对象创建。
An experimental protocol for the realization of three-dimensional periodic metallic micro/nanostructures over large areas is presented. Simultaneous fabrication of hundreds of three-dimensional complex polymer structures is achieved using a two-photon photopolymerization (TPP) technique combined with a microlens array. Metallization of the structures is performed through the deposition of thin and highly conductive films by electroless plating. A chemical modification of the photopolymerizable resin and the production of a hydrophobic coating on the glass surface supporting the structures are realized. This process prevents metal deposition on the substrate and restricts adhesion on polymer. Our technique can produce periodic and/or isolated metallic structures with arbitrary shape, created by more than 700 individual objects written in parallel.