Elimination of cracking during UV laser ablation of SrTiO3 single crystals by employing a femtosecond laser
Elimination of cracking during UV laser ablation of SrTiO3 single crystals by employing a femtosecond laser
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DOI：
10.1016/j.apsusc.2005.07.072
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发表时间：
2005-12
影响因子：
6.7
通讯作者：
S. Zoppel;S. Zoppel;D. Gray;M. Farsari;R. Merz;R. Merz;R. Merz;G. Reider;C. Fotakis
中科院分区：
文献类型：
--
作者：
S. Zoppel;S. Zoppel;D. Gray;M. Farsari;R. Merz;R. Merz;R. Merz;G. Reider;C. Fotakis
我们已经进行了比较研究的紫外激光烧蚀SrTiO 3与纳秒和亚皮秒源，分别。实验采用波长为248nm、脉冲宽度为34ns和500fs的激光进行。飞秒烧蚀原来是更有效的一个数量级，并消除了已知的问题，裂纹的SrTiO 3在激光加工过程中与较长的脉冲。此外，用飞秒脉冲消融的腔体显示出更光滑的表面，没有熔化的迹象，边缘清晰。这些效应可以通过使用超短脉冲降低材料上的热冲击效应来解释。
We have performed a comparative study of UV laser ablation of SrTiO3with nanosecond- and sub-picosecond sources, respectively. The experiments were performed with lasers at a wavelength of 248nm and pulse durations of 34ns and 500fs. Femtosecond ablation turns out to be more efficient by one order of magnitude and eliminated the known problem of cracking of SrTiO3during laser machining with longer pulses. In addition, the cavities ablated with femtosecond pulses display a smoother surface with no indication of melting and well-defined, sharp edges. These effects can be explained by the reduced thermal shock effect on the material by using ultrashort pulses.