Design and Fabrication of a PDMS/Parylene Microvalve for the Treatment of Hydrocephalus
Design and Fabrication of a PDMS/Parylene Microvalve for the Treatment of Hydrocephalus
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DOI：
10.1109/jmems.2011.2148158
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发表时间：
2011-08-01
影响因子：
2.7
通讯作者：
Noh, Hongseok
中科院分区：
文献类型：
--
作者：
Oh, Jonghyun;Kim, Gyuman;Noh, Hongseok
我们提出了一种用于治疗病理状况的新型微阀，即，脑积水该微阀由聚二甲基硅氧烷/聚对二甲苯复合材料层制成，该复合材料层具有三维圆顶花瓣形状。这种几何形状使得微型阀能够在向前和向后方向上整流流体流动。研究了圆顶形SU-8模具制造和准分子激光加工阀开口等新的微加工技术，以构建所提出的微阀。通过体外流动实验研究了微阀的压降与流量特性。流动测试结果表明，发现具有横切开口形状（200 μ m × 60 μ m）的10 × 10微阀阵列对于脑积水的治疗是最佳的。
We present a novel microvalve for the treatment of a pathological condition, i.e., hydrocephalus. This microvalve is made of polydimethylsiloxane/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to rectify fluid flow in the forward and backward directions. New microfabrication techniques such as dome-shaped SU-8 mold fabrication and excimer laser machining for valve opening have been investigated to build the proposed microvalve. The pressure drop versus flow rate characteristics of the fabricated microvalve was investigated through in vitro flow tests. The flow test results showed that a 10 x 10 microvalve array with a cross-cut opening shape (200 mu m x 60 mu m) was found to be optimal for the treatment of hydrocephalus.