Effect of cantilever deformation and tip-sample contact area on AFM nanoscratching
Effect of cantilever deformation and tip-sample contact area on AFM nanoscratching
复制标题
悬臂变形和针尖-样品接触面积对 AFM 纳米划痕的影响
DOI：
10.1116/1.4825405
复制
发表时间：
2013-11-01
影响因子：
1.4
通讯作者：
Hu, Zhenjiang
中科院分区：
文献类型：
--
作者：
Geng, Yanquan;Yan, Yongda;Hu, Zhenjiang
本工作研究了悬臂梁变形和针尖-样品接触面积对基于原子力显微镜（AFM）的划痕试验性能的影响。纳米划痕试验进行了使用金字塔金刚石针尖在铝合金表面。给出了AFM悬臂梁的三种典型变形状态，并利用一种新的方法得到了作用在样品表面的实际法向载荷。建立了基于AFM的三面锥针尖纳米划痕的理论模型，计算了不同划痕方向下针尖-样品接触面积的影响。利用该模型可以得到相应的理论法向载荷。实验和理论结果进行了比较，在预期的加工深度，与不同的划痕方向的正常负载。切屑与刀尖前刀面之间的接触长度是导致刀尖与试样接触面积增大的关键因素。这导致了一个实际的规范...
The present work investigates the effect of cantilever deformation and tip-sample contact area on the performance of atomic force microscopy (AFM)-based scratching tests. Nanoscratching tests are carried out using a pyramidal diamond tip on aluminum alloy surfaces. Three typical AFM cantilever deformation states are illustrated, and the actual normal loads applied on the surface of the sample are obtained using a new method. A theoretical model for AFM-based nanoscratching using a three-sided pyramidal tip is also established to calculate the effect of the tip-sample contact area for different scratching directions. The corresponding theoretical normal loads can be obtained with this model. Experimental and theoretical results are compared for the normal loads at an expected machined depth, with different scratching directions. The contact length between the chip and the rake face of the tip is found to be the key factor leading to an increase in the tip-sample contact area. This results in an actual norm...