The effect of pulse sequence modulation and pulse energy on structural coating properties and coating composition
The effect of pulse sequence modulation and pulse energy on structural coating properties and coating composition
复制标题
脉冲序列调制和脉冲能量对结构涂层性能和涂层成分的影响
DOI：
10.1016/j.surfcoat.2005.08.064
复制
发表时间：
2005
影响因子：
5.4
通讯作者：
M. Maes
中科院分区：
文献类型：
--
作者：
K. Bobzin;E. Lugscheider;M. Maes
不断提高的工具和机器部件性能需要新颖的涂层，并导致对复杂，细粒度结构和PVD涂层的分级组成的需求，以满足高要求。脉冲电源提供了一个极好的机会，沉积不导电，高品质的涂层具有出色的沉积速率。许多论文报道了高电离度和等离子体密度增加的积极作用。在工业涂覆设备中，采用双极、双阴极排列的双极电源来改变涂覆成分并产生渐变层。为此，在沉积过程中改变了脉冲能量。采用等离子体诊断和普通薄膜分析技术对涂层过程进行了分析。
The ever-increasing tool and machine part performance require novel coatings and have led to the demand for complex, fine-grained structures and a graded composition of PVD coatings in order to fulfill the high demands. Pulsed power supplies offer an excellent opportunity to deposit non-conductive, high-quality coatings with outstanding deposition rates. Many papers report a positive effect of higher ionization and increased plasma density. In this paper, bipolar power supplies with a duplex, dual-cathode arrangement were used to vary coating composition and generate a graded layer in industrial coating equipment. For this purpose, the pulse energy was altered during deposition. The coating process was analyzed by both plasma diagnostics as well as common thin-film analytical techniques.