Electrical method to measure the dynamic behaviour and the quadrature error of a MEMS gyroscope sensor
Electrical method to measure the dynamic behaviour and the quadrature error of a MEMS gyroscope sensor
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DOI：
10.1016/j.sna.2006.11.006
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发表时间：
2007-02-28
影响因子：
4.6
通讯作者：
Vanali, Marcello
中科院分区：
文献类型：
--
作者：
Cigada, Alfredo;Leo, Elisabetta;Vanali, Marcello
振动MEMS传感器上的电子器件只能补偿设备机械特性的微小变化。因此，在将MEMS传感器投入市场之前，找到一种简单快速的方法来评估MEMS传感器的机械参数（例如谐振频率和阻尼系数）是非常重要的[A. Escherada，E. Leo，M. Vanali，测量MEMS陀螺仪传感器动态行为的光学和电气方法，IMECE 2005 ASME国际机械工程大会和2005年博览会论文集，奥兰多，佛罗里达，美国[ 14]。此外，对于振动MEMS陀螺仪，正交误差，即[Y.Y Bao，C.L. Yung，Modeling and compensation of quadrature error for silicon MEMS microgyroscope]，必须保持在给定阈值以下，以便能够准确地测量低角速度。验证测试通常在生产过程结束时进行，即当封装完成时。因此，只有电气测量是可能的。在本文中，提出了一种可靠的方法来确定机械参数，以及通过电气测量的MEMS器件的正交误差和结果相比，更传统的光学测量。(c)2006 Elsevier B.V.保留所有权利。
The electronics on board of a vibrating MEMS sensor is able to compensate only for small changes in the mechanical characteristics of the device. Thus, it is of great importance to find an easy and fast way to evaluate the mechanical parameters, such as the resonance frequency and the damping coefficient, of a MEMS sensor before putting the device on the market [A. Cigada, E. Leo, M. Vanali, Optical and electrical methods to measure the dynamic behaviour of a MEMS gyroscope sensor, Proceedings of IMECE2005 ASME International Mechanical Engineering Congress and Exposition 2005, Orlando, Florida, USA [ 14]]. Moreover, for a vibrating MEMS gyroscope also the quadrature error, i.e. [Y.Y Bao, C.L. Yung, Modelling and compensation of quadrature error for silicon MEMS microgyroscope], has to be kept below a given threshold in order to be able to acurately measure low angular speeds.Verification tests are usually carried out at the end of the production process, i.e. when the package is complete. Thus, only electrical measurements are possible. In the present paper, a reliable approach to determine mechanical parameters as well as the quadrature error of the MEMS device through electrical measurements is proposed and results are compared to more traditional optical measurements. (c) 2006 Elsevier B.V. All rights reserved.