High-sensitivity microelectromechanical systems-based tri-axis force sensor for monitoring cellular traction force
High-sensitivity microelectromechanical systems-based tri-axis force sensor for monitoring cellular traction force
复制标题
基于高灵敏度微机电系统的三轴力传感器，用于监测细胞牵引力
DOI：
10.1049/mnl.2016.0246
复制
发表时间：
2016
影响因子：
1.3
通讯作者：
Shimoyama Isao
中科院分区：
文献类型：
--
作者：
Nguyen Thanh-Vinh;Omiya Tomoki;Tsukagoshi Takuya;Hirayama Kayoko;Noda Kentaro;Matsumoto Kiyoshi;Shimoyama Isao
报道了一种用于测量单电池牵引力的高灵敏度三轴力传感器。开发的传感器由十字形Si结构和双层光致抗蚀剂帽支撑的微柱组成。在Si结构上形成的压敏电阻允许同时测量作用在微柱上的法向力和剪切力。此外，帽防止细胞接触Si结构，这在测量作用在微柱上的力时是不期望的。评估了培养基对传感器阻抗和测量电路噪声水平的影响。使用下面没有通孔的压敏电阻补偿温度效应。对于测量，在培养基内，从测量信号的标准偏差获得的传感器的分辨率小于2nN。最后，它被证明是能够测量的牵引力在三维由骨肉瘤细胞时，它从胰蛋白酶处理下的微柱分离。
A high‐sensitivity tri‐axis force sensor designed to measure the traction force of a single cell is reported. The developed sensor consists of a micropillar that is supported by a cross‐shaped Si structure and a double‐layer photoresist cap. The piezoresistors formed on the Si structure allow for the simultaneous measurement of the normal and shear forces acting on the micropillar. Moreover, the cap prevents the cells from contacting the Si structure, which is not desirable when measuring the force acting on the micropillar. The effect of the culture medium on the impedance of the sensor and the noise level of the measurement circuit was evaluated. The temperature effect was compensated using a piezoresistor that does not possess a through‐hole underneath. For measurement, inside a culture medium, the resolution of the sensor obtained from the standard deviations of the measured signals was less than 2 nN. Finally, it was demonstrated that the sensor is capable of measuring the traction force in three dimensions generated by an osteosarcoma cell when it detaches from the micropillar under trypsin treatment.