Embedded optical fiber link interferometer sensors for snapshot surface inspection using the synthetic wavelength technique.
Embedded optical fiber link interferometer sensors for snapshot surface inspection using the synthetic wavelength technique.
复制标题
嵌入式光纤链路干涉仪传感器使用合成波长技术进行快照表面检查。
DOI：
10.1364/ao.417370
复制
发表时间：
2021
期刊：
影响因子：
1.9
通讯作者：
M. Fakhri
中科院分区：
文献类型：
--
作者：
M. Hassan;Basman M. Al;M. Fakhri
自由空间光学测量系统可以对在传播路径中操作的评估系统具有直接影响。在通过光纤传播期间，光遭受散射或干涉，导致具有不确定结果的一些输出信号损失。因此，本研究旨在探索与单模和多模光纤使用相关的即时决策，以及它们如何影响高速光学测量仪器链路的数据收集。该研究还旨在解决一些设计方法方面和经验的结果，表面形貌测量传感器的基础上，能够表面粗糙度或台阶高度测量的光纤。研究表明，傅里叶变换轮廓术方法（FTP）可以克服光学计量传感器的缺点（例如，庞大、具有挑战性的设置、高成本和低速度）。然而，尽管消除了垂直高度的问题，傅里叶变换轮廓术（FTP）确实有一些缺点，为每一个结果有关的核心变量，包括色散光纤链路传感器。合成波长法使色散光纤链路传感器能够计算所选样品的垂直台阶高度（1 µm）。步高重复性得到改善，结果改善范围为20 - 18 nm。额外的调查是必要的，以建立单模或多模光纤传感器与特定仪器的兼容性，特别是那些目前首选的嵌入式计量应用。
Free-space optical measurement systems can have a direct impact on evaluation systems operational in propagation paths. During propagation via optical fibers, light suffers scattering or interference, causing some output signal loss with an uncertainty outcome. Therefore, this study aims to explore the instant decisions related to the use of single- and multi-mode fiber optics and how they affect the gathering of data from high-speed optical measurement instrument links. The study also seeks to address a number of design methodology aspects and the empirical outcomes related to a surface topography measurement sensor based on fiber optics capable of surface roughness or step-height measurement. The study suggests that the Fourier transform profilometry method (FTP) can overcome the disadvantages of optical metrology sensors (e.g., bulkiness, challenging set-up, high costs, and low speed). However, despite eliminating vertical height problems, the Fourier transform profilometry (FTP) did have some shortcomings for every outcome related to core variables, including the dispersive optical fiber link sensor. The synthetic wavelength method enabled the dispersive optical fiber link sensor to calculate the vertical step height of the selected sample (1 µm). There was improved step-height repeatability, with satisfactory from 20 to 18 nm outcome improvement range. Additional investigations are necessary to establish the compatibility of single- or multi-mode optical fiber sensors with particular instruments, especially those currently preferred for embedded metrology applications.