Effects of chemical composition on the optical properties of Zn1−xCdxO thin films
Effects of chemical composition on the optical properties of Zn1−xCdxO thin films
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DOI：
10.1063/1.1771810
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发表时间：
2004-07
影响因子：
4
通讯作者：
Sang Yeol Lee;Yan Li;Jang‐Sik Lee;J. Lee;M. Nastasi;S. Crooker;Q. Jia;H. Kang;Jeongan Kang-Jeongan-Kan
中科院分区：
文献类型：
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作者：
Sang Yeol Lee;Yan Li;Jang‐Sik Lee;J. Lee;M. Nastasi;S. Crooker;Q. Jia;H. Kang;Jeongan Kang-Jeongan-Kan
通过脉冲激光沉积在（0001）蓝宝石衬底上沉积了Zn 1-xCdxO薄膜。Zn 1 −xCdxO薄膜的结构和光学性质与工艺条件密切相关。由于Cd和Zn物种之间的蒸气压差，薄膜的组成作为沉积温度的函数非单调变化。通过光致发光和透射率测量，Zn 1 −xCdxO薄膜的光学带隙在3.249 ~ 3.291eV之间变化。通过卢瑟福背散射光谱测定，光学性质的变化主要归因于Zn 1 −xCdxO化学计量的变化。
Zn1−xCdxO thin films were deposited on (0001) sapphire substrates by pulsed-laser deposition. Structural and optical properties of Zn1−xCdxO films were strongly correlated to the processing conditions. The composition of the films varied nonmonotonically as a function of deposition temperatures due to the difference of vapor pressure between Cd and Zn species. The optical energy bandgap of Zn1−xCdxO thin films, measured by photoluminescence and transmittance, changed from 3.249to3.291eV. The change of the optical properties was mainly attributed to the change of the stoichiometry of Zn1−xCdxO, as determined by Rutherford backscattering spectroscopy.