Electron Energy Control in Inductively Coupled Plasma Employing Multimode Antenna
Electron Energy Control in Inductively Coupled Plasma Employing Multimode Antenna
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采用多模天线的电感耦合等离子体中的电子能量控制
DOI：
10.1143/jjap.38.l1066
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发表时间：
1999
影响因子：
1.5
通讯作者：
S. Fujii
中科院分区：
文献类型：
--
作者：
H. Shindo;T. Urayama;T. Fujii;Y. Horiike;S. Fujii
研究了一种采用多模天线的电感耦合等离子体中的电子能量控制方法，以在超大规模集成电路 (ULSI) 制造工艺中实现高蚀刻性能。通过将天线的方位角模式从 m=0 更改为 m=1 来降低电子能量，而电子密度没有显着变化。通过 Langmuir 探针测量发现 m=1 模式下的电子能量减少。这种行为也得到了光学发射光谱的证实。由于能量降低在较低压力下更为显着，因此被认为是由于较高模式天线中较短长度的感应场的反转所致。
A method of electron energy control was studied in an inductively coupled plasma employing a multimode antenna, for high etching performance in ultra large-scale-integrated circuit (ULSI) fabrication processes. Electron energy was reduced by changing the azimuthal mode of the antenna from m=0 to m=1 with no notable change in electron density. The electron energy reduction at the m=1 mode was found by Langmuir probe measurement. This behavior was also confirmed by optical emission spectroscopy. Since the energy reduction was more remarkable at lower pressures, it was considered to be due to the reverse of the induction field with a smaller length in the higher mode antenna.