100% Fill-Factor Aspheric Microlens Arrays (AMLA) With Sub-20-nm Precision
100% Fill-Factor Aspheric Microlens Arrays (AMLA) With Sub-20-nm Precision
复制标题
100%%20填充因子%20非球面%20微透镜%20阵列%20(AMLA)%20含%20亚20纳米%20精度
DOI：
10.1109/lpt.2009.2029346
复制
发表时间：
2009-10-15
影响因子：
2.6
通讯作者：
Sun, Hong-Bo
中科院分区：
文献类型：
--
作者：
Wu, Dong;Chen, Qi-Dai;Sun, Hong-Bo
用单个非球面微透镜（阵列）代替复杂的多透镜系统，不仅可以使光学系统体积更小、重量更轻、几何形状更好，甚至可以降低成本，而且可以显著改善光学性能，如成像质量。然而，非球面微透镜或微透镜阵列的制造在技术上具有挑战性，因为用于宏观尺寸的非球面的常规技术（如单点金刚石铣削）和用于球面微透镜的常规技术（如热回流）不能在小至几微米至几十微米的区域中限定复杂的透镜轮廓。在这里，我们解决了这个问题，通过使用飞秒激光微纳米纤维通过双光子聚合。不仅可以制作出轮廓清晰的单透镜，而且可以制作出填充率为100%的非球面微透镜阵列。透镜轮廓的平均误差与理论模型的偏差仅为17.3 nm，是迄今为止报道的最小误差。
Substitution of a single aspheric microlens (array) for a complex multilens system results in not only smaller size, lighter weight, compacter geometry, and even possibly lower cost of an optical system, but also significant improvement of its optical performance such as better imaging quality. However, fabrication of aspheric microlens or microlens array is technically challenging because conventional technologies used for macro-sized aspheres like single-point diamond milling, and those for spherical microlens like thermal reflow, are not capable of defining a complicated lens profile in an area as small as several to tens of micrometers. Here we solve the problem by using femtosecond laser micro-nanofabrication via two photon polymerization. Not only well-defined single lens, but also 100% filling ratio aspheric microlens array were readily produced. The average error of the lens profile is only 17.3 nm deviated from the theoretical model, the smallest error reported so far.