Depth profiling of organic films with X-ray photoelectron spectroscopy using C60+ and Ar+ co-sputtering.
Depth profiling of organic films with X-ray photoelectron spectroscopy using C60+ and Ar+ co-sputtering.
复制标题
使用 C60 和 Ar 共溅射，通过 X 射线光电子能谱对有机薄膜进行深度剖析。
DOI：
10.1021/ac702626n
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发表时间：
2008
影响因子：
7.4
通讯作者：
J. Shyue
中科院分区：
文献类型：
--
作者：
Bang;Ying;Wei;Mao;Shu;Wei;Yu‐Chin Lin;J. Jou;C. Chu;J. Shyue
用10KV、10NaC60+和0.2KV、300NaAr+离子束同时溅射有机薄膜，并用X射线光电子能谱对新曝光的表面进行分析，得到了包括有机发光二极管和倒置结构的聚合物太阳电池在内的有机薄膜器件。每一层的化学成分和结构都被保存下来，并清晰可见。虽然C60+溅射被证明对分析有机薄膜是有用的，但由于C60+束的非恒定溅射速率，如果没有低能量的Ar+束共溅射，厚有机器件就不能被仿形。在这项研究中，研究了不同的离子束剂量组合。结果表明，较高剂量的Ar~+束对C60~+离子束有干扰作用，溅射速率随总离子电流的增大而减小。结果表明，低能单原子束可以破坏团簇离子束的原子沉积，极大地扩展了团簇离子溅射的应用范围。通过实现稳定的溅射速率，同时最大限度地减少损伤累积，这项研究为研究软物质和有机电子铺平了道路。
By sputtering organic films with 10 kV, 10 nA C60+ and 0.2 kV, 300 nA Ar+ ion beams concurrently and analyzing the newly exposed surface with X-ray photoelectron spectroscopy, organic thin-film devices including an organic light-emitting diode and a polymer solar cell with an inverted structure are profiled. The chemical composition and the structure of each layer are preserved and clearly observable. Although C60+ sputtering is proven to be useful for analyzing organic thin-films, thick organic-devices cannot be profiled without the low-energy Ar+ beam co-sputtering due to the nonconstant sputtering rate of the C60+ beam. Various combinations of ion-beam doses are studied in this research. It is found that a high dosage of the Ar+ beam interferes with the C60+ ion beam, and the sputtering rate decreases with increasing the total ion current. The results suggest that the low-energy single-atom projectile can disrupt the atom deposition from the cluster ion beams and greatly extend the application of the cluster ion-sputtering. By achievement of a steady sputtering rate while minimizing the damage accumulation, this research paves the way to profiling soft matter and organic electronics.