GAS-CHROMATOGRAPHIC AIR ANALYZER FABRICATED ON A SILICON-WAFER
GAS-CHROMATOGRAPHIC AIR ANALYZER FABRICATED ON A SILICON-WAFER
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DOI：
10.1109/t-ed.1979.19791
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发表时间：
1979-01-01
影响因子：
3.1
通讯作者：
ANGELL, JB
中科院分区：
文献类型：
--
作者：
TERRY, SC;JERMAN, JH;ANGELL, JB
基于气相色谱原理，建立了一套小型气体分析系统。主要部件是用硅制造的，使用光刻和化学蚀刻技术，与传统的实验室仪器相比，它的尺寸减小了近三个数量级。该色谱系统由一个进样阀和一个1.5米长的分离毛细管柱组成，它们被制作在衬底硅片上。输出热导率检测器单独批量制造并集成安装在衬底晶片上。气相色谱理论已被用来优化传感器的性能，使气态烃混合物的分离在不到10秒。该系统有望在便携式环境空气质量监测仪、植入生物实验和行星探测器等领域得到应用。
A miniature gas analysis system has been built based on the principles of gas chromatography (GC). The major components are fabricated in silicon using photolithography and chemical etching techniques, which allows size reductions of nearly three orders of magnitude compared to conventional laboratory instruments. The chromatography system consists of a sample injection valve and a 1.5-m-long separating capillary column, which are fabricated on a substrate silicon wafer. The output thermal conductivity detector is separately batch fabricated and integrably mounted on the substrate wafer. The theory of gas chromatography has been used to optimize the performance of the sensor so that separations of gaseous hydrocarbon mixtures are performed in less than 10 s. The system is expected to find application in the areas of portable ambient air quality monitors, implanted biological experiments, and planetary probes.