Development of a small and versatile electron beam ion source using a permanent magnet
Development of a small and versatile electron beam ion source using a permanent magnet
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使用永磁体开发小型多功能电子束离子源
DOI:
10.1088/0031-8949/1997/t73/125
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发表时间:
1997
期刊:
影响因子:
2.9
通讯作者:
M. Sasao
中科院分区:
文献类型:
--
作者:
T. Kusakabe;T. Sano;Y. Yura;T. Osaka;Y. Nikajima;Y. Nakai;H. Tawara;M. Sasao
A small and versatile electron beam ion source with a ring permanent magnet, called micro-EBIS, has been constructed. Ne7+ and Ar9+ ions are extracted at about 20 and 70 counts per second, respectively, with 2.0 keV/ 1 mA electron beam. The detailed electron trajectry analysis suggests that a slight modification can result in better electron beam focussing and in producing higher charged ions.