Directed batch assembly of three-dimensional helical nanobelts through angular winding and electroplating
Directed batch assembly of three-dimensional helical nanobelts through angular winding and electroplating
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DOI：
10.1088/0957-4484/18/5/055304
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发表时间：
2007-02-07
期刊：
影响因子：
3.5
通讯作者：
Nelson, B. J.
中科院分区：
文献类型：
--
作者：
Bell, D. J.;Bauert, T. E.;Nelson, B. J.
本文提出了一种卷状三维螺旋纳米带定向批量组装的新技术。控制湿法蚀刻时间，以便利用横向上额外的角缠绕运动将自形成的 SiGe/Si/Cr 纳米带的松散端定位在电极上方。在随后的电镀金步骤中，触点被电铸并完成批量组装，同时结构的电导增加。
This paper presents a new technique for the directed batch assembly of rolled-up three-dimensional helical nanobelts. The wet etch time is controlled in order for the loose end of the self-formed SiGe/Si/Cr nanobelts to be located over an electrode by taking advantage of the additional angular winding motion in the lateral direction. In a subsequent Au electroplating step, contacts are electroformed and the batch assembly is completed, while at the same time the conductance of the structures is increased.