Large range dual-axis micro-stage driven by electrostatic comb-drive actuators
Large range dual-axis micro-stage driven by electrostatic comb-drive actuators
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DOI：
10.1088/0960-1317/23/10/105008
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发表时间：
2013-10-01
影响因子：
2.3
通讯作者：
Awtar, Shorya
中科院分区：
文献类型：
--
作者：
Olfatnia, Mohammad;Cui, Leqing;Awtar, Shorya
本文提出了一种微型 XY 平台，该平台采用静电梳状驱动执行器，并实现每个运动轴大于 225 μm 的双向位移范围。拟议的 XY 平台设计包括通过挠性模块互连的四个刚性平台（地面平台、运动平台和两个中间平台）。具有两个平移自由度的运动平台通过各自的平行四边形（P）传动弯曲件连接到两个独立的单自由度中间平台。中间级通过相应的夹紧的成对双平行四边形 (C-DP-DP) 引导弯曲件连接到地面。与成对双平行四边形挠曲件 (DP-DP) 等传统挠曲件不同，C-DP-DP 挠曲件可提供高轴承方向刚度 (K-b)，同时在大范围的运动方向位移上保持低运动方向刚度 (K-m)。这有助于延迟与中间级集成的梳状驱动致动器中侧向不稳定的发生，从而与现有设计相比提供显着更大的致动行程。所提出的工作包括所提出的微平台的闭式刚度分析、有限元模拟以及其静态和动态行为的实验测量。
This paper presents a micro XY stage that employs electrostatic comb-drive actuators and achieves a bi-directional displacement range greater than 225 mu m per motion axis. The proposed XY stage design comprises four rigid stages (ground, motion stage, and two intermediate stages) interconnected via flexure modules. The motion stage, which has two translational degrees of freedom, is connected to two independent single degree of freedom intermediate stages via respective parallelogram (P) transmission flexures. The intermediate stages are connected to the ground via respective clamped paired double parallelogram (C-DP-DP) guidance flexures. The C-DP-DP flexure, unlike conventional flexures such as the paired double parallelogram flexure (DP-DP), provides high bearing direction stiffness (K-b) while maintaining low motion direction stiffness (K-m) over a large range of motion direction displacement. This helps delay the onset of sideways instability in the comb-drive actuators that are integrated with the intermediate stages, thereby offering a significantly greater actuation stroke compared to existing designs. The presented work includes closed-form stiffness analysis of the proposed micro-stage, finite elements simulation, and experimental measurements of its static and dynamic behavior.